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Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition

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Identiferoai:union.ndltd.org:NAGOYA/oai:ir.nul.nagoya-u.ac.jp:2237/9037
Date01 1900
CreatorsHAYASHI, Toshiyuki, MATSUMURO, Akihito, WATANABE, Tomohiko, MORI, Toshihiko, TAKAHASHI, Yutaka, YAMAGUCHI, Katsumi
PublisherThe Japan Society of Mechanical Engineers
Source SetsNagoya University
LanguageEnglish
Detected LanguageEnglish
TypeArticle(publisher)
Rights日本機械学会, 本文データは学協会の許諾に基づきCiNiiから複製したものである。

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