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Realization of ion mass and energy selected hyperthermal ion-beam assisted deposition of thin, epitaxial nitride films: characterization and application

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1. urn:nbn:de:bsz:15-qucosa2-341355
2. https://ul.qucosa.de/id/qucosa%3A34135
3. https://ul.qucosa.de/api/qucosa%3A34135/attachment/ATT-0/

Identifer	oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:34135
Date	04 June 2019
Creators	Schumacher, Philipp
Contributors	Universität Leipzig
Source Sets	Hochschulschriftenserver (HSSS) der SLUB Dresden
Language	German
Detected Language	English
Type	info:eu-repo/semantics/acceptedVersion, doc-type:doctoralThesis, info:eu-repo/semantics/doctoralThesis, doc-type:Text
Rights	info:eu-repo/semantics/openAccess