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Consideration of Deformation of TiN Thin Films with Preferred Orientation Prepared by Ion-Beam-Assisted Deposition

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1. http://hdl.handle.net/2237/9037
2. 1344-7912
3. JSME International Journal. Series A, v.44, n.1, 2001, p.94-99

Identifer	oai:union.ndltd.org:NAGOYA/oai:ir.nul.nagoya-u.ac.jp:2237/9037
Date	01 1900
Creators	HAYASHI, Toshiyuki, MATSUMURO, Akihito, WATANABE, Tomohiko, MORI, Toshihiko, TAKAHASHI, Yutaka, YAMAGUCHI, Katsumi
Publisher	The Japan Society of Mechanical Engineers
Source Sets	Nagoya University
Language	English
Detected Language	English
Type	Article(publisher)
Rights	日本機械学会, 本文データは学協会の許諾に基づきCiNiiから複製したものである。