On the throughput optimization of electron beam lithography systems /

Description

Thesis (doctoral)--Technische Universiteit Delft, 1991. / Summary in Dutch. "Stellingen" ([1] folded leaf) inserted. Vita. Includes bibliographical references (p. BR-1-BR-15).

Links & Downloads

1. http://bibpurl.oclc.org/web/26620
2. http://dds.crl.edu/CRLdelivery.asp?tid=6878

Tags

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/26868069
Date	January 1991
Creators	Mulder, Elvira Hendrika,
Source Sets	OCLC
Language	English
Detected Language	English
Source	Online version