Periodic mesoporous material is a class of solids that possess periodically ordered pores with sizes of 2–50 nm. After a brief introduction to the synthesis, structure, property and function of periodic mesoporous materials in general in Chapter 1, a specific type of periodic mesoporous material, periodic mesoporous organosilica (PMO), is examined in detail in Chapter 2. Chapter 3 and Chapter 4 focus on the application of periodic mesoporous organosilica as low-dielectric-constant (low-k) insulating materials on semiconductor microprocessors. Specifically, Chapter 3 introduces a vapor-phase delivery technique, vacuum-assisted aerosol deposition, for the synthesis of PMO thin films; Chapter 4 studies one property crucial for the application of low-k PMO in detail—hydrophobicity. The focus of Chapter 5 turns to a novel sandwich-structured
nanocomposite made of periodic mesoporous silica and graphene oxide. In Chapter 6,
progress towards the synthesis of periodic mesoporous quartz is summarized. A
conclusion and an outlook are given in Chapter 7.
Identifer | oai:union.ndltd.org:LACETR/oai:collectionscanada.gc.ca:OTU.1807/29901 |
Date | 31 August 2011 |
Creators | Wang, Wendong |
Contributors | Ozin, Geoffrey Alan |
Source Sets | Library and Archives Canada ETDs Repository / Centre d'archives des thèses électroniques de Bibliothèque et Archives Canada |
Language | en_ca |
Detected Language | English |
Type | Thesis |
Page generated in 0.0017 seconds