This study presents a novel concept to integrated nebulizer nozzle plate for FD-ESI (Fused-droplet Electrospary Ionization Mass Spectrometry) using modified LIGA process. This fabrication technique can reduce the production cost of current nozzle plate. It comprises of multi-exposure and single develop (MESD) process, the extra-hard Ni-Co (Nickel-Cobalt) electroforming and thin-wall plastic microinjection molding. The template of nozzle plate is patterned using dry film and MESD process. Later, the template is transferred into metal Ni-Co mold by electroplating. In this study, the technique of extra-hard Ni-Co alloy electroplating process with Hardness of Vickers over (HV) 550 is developed. Then with the stiffness of Ni-Co mold, it can withstand high injection speed. Thin-wall microinjection molding process with short cycle time to fabricate nozzle plate can be finished. Liquid crystal polymer (LCP) is used for thin-wall microinjection molding process. In order to make efficiently atomization, we used ANSYS to optimize PZT actuator. Besides, the work of nebulizer with FD-ESI was demonstrated in this study. a novel design of nozzle plate.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0701105-113151 |
| Date | 01 July 2005 |
| Creators | Chang, Chien-chung |
| Contributors | Che-hsin Lin, Cheng-tang Pan, Chi-hui Chien, Yu-jung Hsu, Chien-hsiang Chao |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0701105-113151 |
| Rights | restricted, Copyright information available at source archive |
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