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Deposition of Thin Film Electrolyte by Pulsed Laser Deposition (PLD) for micro-SOFC Development

Optimalization of PLD deposition of YSZ for micr-SOFC electrolyte applications by varying deposition pressure and target-substrate distance.Substrate used was Si-based chips and wafers (large area PLD), and the substrate temperature was held at 600. Dense films were obtained at 20 mTorr.

Identiferoai:union.ndltd.org:UPSALLA1/oai:DiVA.org:ntnu-19017
Date January 2012
CreatorsKrogstad, Hedda Nordby
PublisherNorges teknisk-naturvitenskapelige universitet, Institutt for materialteknologi, Institutt for materialteknologi
Source SetsDiVA Archive at Upsalla University
LanguageEnglish
Detected LanguageEnglish
TypeStudent thesis, info:eu-repo/semantics/bachelorThesis, text
Formatapplication/pdf
Rightsinfo:eu-repo/semantics/openAccess

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