Among the MEMS field, the design and simulation of piezoelectric micro-actuators are difficult as compared to thermal micro-actuators and electrostatic micro-actuators. The main reason of the piezo-electric material coupling effect is difficult to calculate. However the piezo-electric material has several advantages and characteristics for designing micro-actuators. Moreover, the design is usually done by the experimental or try-and-error method which is not so effective. It should be noted that there is not a simple method already developed for the design and simulation of the piezo-electric micro-actuators.
In this research we proposed to use the software of ANSYS for the simulation of piezo-electric micro-pump. Simulation of force output of piezo-micro-pump can use ANSYS software to establish the simulation system of piezo-micro-pump. The micro-pump will have different resonance frequency, back-pressure and fluid due to piezo-electric characteristic. In this study, the author used a square, rectangle and circle geometric shape to simulate the result, each geometric shape has four different kinds of size. As a result, there are twelve groups of different simulation results. We are able to using the chart to present and explain the relation between resonance frequency and displacement.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0902107-153143 |
| Date | 02 September 2007 |
| Creators | Lin, Nan-kai |
| Contributors | Pan,Cheng-Tang, Chi-Chang Hsieh, Young-Chang Chen |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0902107-153143 |
| Rights | off_campus_withheld, Copyright information available at source archive |
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