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Experimental characterization and physical modeling of resolution limits in proximity printing x-ray lithography

Kathleen R. Early. / Includes bibliographical references (p. 155-163). / Research supported by Joint Services Electronics Program DAAL03-89-C-0001 Research supported by National Science Foundation ECS 87-09806

Identiferoai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/4187
Date January 1991
ContributorsEarly, Kathleen.
PublisherResearch Laboratory of Electronics, Massachusetts Institute of Technology
Source SetsM.I.T. Theses and Dissertation
LanguageEnglish
Detected LanguageEnglish
Format163 p., 12011723 bytes, application/pdf
RelationTechnical report (Massachusetts Institute of Technology. Research Laboratory of Electronics) ; 565.

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