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Plasma etch characteristics of nitrogen trifluoride gas mixtures /

Thesis (Ph. D.)--Lehigh University, 2004. / Includes vita. Includes bibliographical references (leaves 179-187).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/57241645
Date January 2004
CreatorsBarkanic, John A.,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
TypeAcademic dissertations

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