Floor-based Automated Guided Vehicles (AGV) are important for automating transportation tasks in semiconductor manufacturing facilities. They are either used as homogenous systems in low throughput areas (see Ndiaye et al., 2016) or complementarily with ceiling-mounted Overhead Hoist Transport (OHT) systems (see Keil et al., 2018). AGV systems provide the option to exchange transport carriers between its vehicles during transport execution. This increases the flexibility to allocate tasks to the vehicles and could lead to better system performance.
Identifer | oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:90515 |
Date | 14 March 2024 |
Creators | Boden, Patrick |
Contributors | Rank, Sebastian, Schmidt, Thorsten, Technische Universität Dresden |
Source Sets | Hochschulschriftenserver (HSSS) der SLUB Dresden |
Language | English |
Detected Language | English |
Type | info:eu-repo/semantics/acceptedVersion, doc-type:conferenceObject, info:eu-repo/semantics/conferenceObject, doc-type:Text |
Rights | info:eu-repo/semantics/openAccess |
Relation | info:eu-repo/grantAgreement/European Commission/H2020 | ECSEL-IA/826417//The next-generation silicon-based power solutions in mobility, industry and grid for sustainable decarbonisation in the next decade/Power2Power |
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