Abstract
A projected fringe profilomertry ¡]PFP¡^ using a supercontinuum light illumination for micro-scale measurement is proposed. The supercontinuum light is generated by launching ultra short laser into a highly nonlinear photonic crystal fibers.
The supercontinuum light with the following advantage¡G
¡]1¡^ Depth of the field is very large in the projected system.
¡]2¡^No speckle noise in the illumination system.
Experiment results has shown that using supercontinuum light is superior to other illumination system This study indicates that the proposed measurement scheme could be applied to 3D shape measurements with large depth variation, especially for semi-conductor devices¡Bmicro electro-mechanical devices and biomedical species.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0626106-175611 |
| Date | 26 June 2006 |
| Creators | Huang, chia-jeng |
| Contributors | Yue Ou Yang, Wei-Chia Su, Wei-Hung Su |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0626106-175611 |
| Rights | off_campus_withheld, Copyright information available at source archive |
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