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Incorporation of air-filled pores/forms in a polyimide/benzocyclobutene matrix using a sacrifical commerical polymer for low K microelectronic applications

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1. http://hdl.handle.net/1853/19101
2. 590550

Identifer	oai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/19101
Date	12 1900
Creators	Williamson, Jaimal Mallory
Publisher	Georgia Institute of Technology
Source Sets	Georgia Tech Electronic Thesis and Dissertation Archive
Detected Language	English
Type	Thesis
Rights	Access restricted to authorized Georgia Tech users only.