Chan, Ho Yin. / Thesis (M.Phil.)--Chinese University of Hong Kong, 2003. / Includes bibliographical references (leaves 92-94). / Abstracts in English and Chinese. / ABSTRACT --- p.i / 摘要 --- p.iii / ACKNOWLEDGEMENTS --- p.iv / PUBLISHED PAPERS --- p.vi / TABLE OF CONTENTS --- p.vii / LIST OF FIGURES --- p.ix / LIST OF TABLES --- p.xi / Chapter Chapter 1 --- Introduction --- p.1 / Chapter 1.1 --- Traditional methods of cell manipulation --- p.1 / Chapter 1.2 --- New methods of cell manipulation using MEMS technology --- p.2 / Chapter 1.2.1 --- Electrostatic actuation --- p.2 / Chapter 1 2.2 --- Shape memory effect --- p.4 / Chapter 1.2.3 --- Pneumatic --- p.5 / Chapter 1.2.4 --- Electromagnetic --- p.5 / Chapter 1.2.5 --- Thermal --- p.6 / Chapter 1.3 --- Objective of this project --- p.1 / Chapter Chapter 2 --- Literature review --- p.11 / Chapter Chapter 3 --- "Design, modeling and heat transfer analysis" --- p.14 / Chapter 3.1 --- Design and the temperature-radius relationship of thermal actuators --- p.14 / Chapter 3.2 --- Heat transfer analysis --- p.17 / Chapter 3.2.1 --- Heat dissipation from the actuator --- p.18 / Chapter 3.2.2 --- Thermal transient response in liquid environment --- p.23 / Chapter 3.3 --- "Temperature, radius of curvature and tip deflection and actuation voltage relationship" --- p.24 / Chapter Chapter 4 --- Fabrication process of the thermal actuators --- p.28 / Chapter 4.1 --- Basic processes involved in fabricating the thermal actuators --- p.28 / Chapter 4.1.1 --- Photolithography --- p.28 / Chapter 4.1.1.1 --- Spin on and pattern photoresist --- p.29 / Chapter 4.1.1.2 --- Methods for alignment --- p.31 / Chapter 4.1.2 --- Lift off and etching processes --- p.33 / Chapter 4.1.3 --- Sacrificial release process --- p.35 / Chapter 4.1.4 --- Deposition --- p.38 / Chapter 4.1.4.1 --- Sputtering --- p.39 / Chapter 4.1.4.2 --- Thermal evaporation --- p.39 / Chapter 4.1.4.3 --- Thermal oxidation --- p.40 / Chapter 4.1.4.4 --- Parylene deposition --- p.41 / Chapter 4.2 --- Fabrication process of thermal actuators/grippers --- p.45 / Chapter 4.2.1 --- Fabrication of thermal actuators --- p.45 / Chapter 4.2.1.1 --- Mask design and making --- p.45 / Chapter 4.2.1.2 --- Process flow --- p.49 / Chapter 4.2.1.3 --- Fabricated samples --- p.53 / Chapter 4.2.1.4 --- Problems encountered during fabrication process --- p.54 / Chapter 4.2.2 --- Fabrication of multi-finger gripper --- p.55 / Chapter 4.2.2.1 --- Mask design --- p.55 / Chapter 4.2.2.2 --- Process flow --- p.57 / Chapter 4.2.2.3 --- Fabricated samples --- p.57 / Chapter Chapter 5 --- Testing thermal actuators --- p.58 / Chapter 5.1 --- Actuation by applying voltage (underwater) --- p.58 / Chapter 5.1.1 --- Experimental setup --- p.58 / Chapter 5.1.2 --- Experimental results --- p.59 / Chapter 5.1.3 --- Discussion --- p.63 / Chapter 5.2 --- Actuation by water bath heating --- p.66 / Chapter 5.2.1 --- Experimental setup --- p.66 / Chapter 5.2.2 --- Experimental results --- p.66 / Chapter 5.2.3 --- Discussion --- p.68 / Chapter 5.3 --- Frequency response and force analysis --- p.69 / Chapter 5.3.1 --- Frequency response --- p.69 / Chapter 5.3.2 --- Force analysis --- p.70 / Chapter Chapter 6 --- Cell grasping system --- p.73 / Chapter 6.1 --- Demonstration of cell grasping using single arm gripper --- p.73 / Chapter 6.2 --- MEMS chip with multi-finger grippers --- p.75 / Chapter 6.2.1 --- Mask design for MEMS chip --- p.76 / Chapter 6.2.2 --- Actuation of thermal gripper in air --- p.78 / Chapter 6.2.3 --- Demonstration of actuation and cell grasping --- p.79 / Chapter 6.2.4 --- A flexible cell grasping motion --- p.80 / Chapter 6.3 --- Proposed cell grasping system --- p.82 / Chapter Chapter 7 --- Summary and future work --- p.83 / Chapter 7.1 --- Summary --- p.83 / Chapter 7.2 --- Future work --- p.84 / APPENDIX --- p.87 / BIBLIOGRAPHY --- p.92
| Identifer | oai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_324266 |
| Date | January 2003 |
| Contributors | Chan, Ho Yin., Chinese University of Hong Kong Graduate School. Division of Automation and Computer-Aided Engineering. |
| Source Sets | The Chinese University of Hong Kong |
| Language | English, Chinese |
| Detected Language | English |
| Type | Text, bibliography |
| Format | print, xi, 1, 94 leaves : ill. (some col.) ; 30 cm. |
| Rights | Use of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/) |
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