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Sol-gel based Optical Splitters on Silicon Substrate

1 x N optical power splitters using hybrid sol-gel glasses based on buried waveguide structure on silicon substrate were fabricated. The advantage over conventional ridge structures is the fact that Y branch of the splitters can be easily obtained with the buried structure using standard photo lithography processes. Now we can successfully make the width of Y branch of less of 1um.
Proximity printing was used to define the waveguide trench on sol-gel films. Then burying the sol-gel glass into the trench to define waveguide core. Finally the waveguide was packaged for measurement after coating a sol-gel top cladding layer onto the guiding layer. The propagation losses of this waveguide device are 0.69 dB/cm and 0.70 dB/cm for TE and TM polarized lights. The coupling losses are 1.57 dB and 1.89 dB for TE and TM lights with a index contrast of 0.66 %. The insertion loss and the branching loss of the 1¡Ñ2 splitter are 5.7 dB and 0.3 dB¡Arespectively.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0615105-154813
Date15 June 2005
CreatorsHsu, Chao-kai
ContributorsYen Chu, Ju-Tah Tung, Ann-Kuo Chu, Pei Tien
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageCholon
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0615105-154813
Rightsunrestricted, Copyright information available at source archive

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