The purpose of this thesis is to fabricate 12-layer In0.75Ga0.25As quantum dot-in-a-well (In0.1Ga0.9As) structures grown by molecular-beam epitaxy (MBE) on GaAs substrate, and analyze the optical properties of laser devices for optical fiber communication systems.
For the laser structures, larger Al content AlGaAs cladding layer enhance the optical confinement, but encounter much challenges to improve the quality. After we simulate and fabricate different Al content laser structures, we find the best cladding layer composition - Al0.2Ga0.8As which performs a best material gain. In the active layer, 12 layers In0.75Ga0.25As quantum dots (QDs) and QDs in a well (DWell) structure, and DWell with Be-doping in the well structure are included in this study. The well structure slows down the hot carriers speed and Be-doping decrease the carrier life time and increases the electron-hole pair recombination rate. We increase the QDs deposition coverage to move the emission wavelength to 1.3£gm, but the high temperature cladding layer growth process indirectly anneal the QDs and result in the emission wavelength blue shift to 1.24£gm.
In the laser fabrication, to transport the light wave in smaller dispersion loss single mode waveguide, wet etching photolithography processes are adapted in this study to fabricate 2£gm width ridge waveguide. The as-cleaved facets are used as Fabry-Perot laser mirrors in ridge waveguide lasers.
Finally, the current density of QD Laser(C528) lasing in CW mode is 581A/cm2, slope efficiency of 510mW/A and maximum power/facet of 65mW are obtained.Then the current density of DWELL+PD Laser(C540) lasing in CW mode is 880A/cm2, slope efficiency of 430mW/A and maximum power/facet of 34mW are obtained.
Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0714111-155147 |
Date | 14 July 2011 |
Creators | Lin, Ting-Yu |
Contributors | Min-Hsiung Shih, Yi-Jen chiu, GRay Lin, Tsong-sheng Lay, Chien-Chung Lin |
Publisher | NSYSU |
Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
Language | Cholon |
Detected Language | English |
Type | text |
Format | application/pdf |
Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0714111-155147 |
Rights | not_available, Copyright information available at source archive |
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