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The Influence of Sputtering Pressure and Film Thickness on Metal Resistivity

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Identifer	oai:union.ndltd.org:LACETR/oai:collectionscanada.gc.ca:AEU.uuid#d4090a32-f44d-4478-b2d0-1676cbb0cad3
Creators	Xu, Can
Publisher	University of Alberta
Source Sets	Library and Archives Canada ETDs Repository / Centre d'archives des thèses électroniques de Bibliothèque et Archives Canada
Language	English
Detected Language	English
Type	Thesis
Format	application/pdf