This thesis is mainly proposed and discussed the characteristics of polycrystalline silicon thin film transistor putting forward and probing into four kinds of novel buried-oxide structures. Because of the shortcoming of the traditional polycrystalline silicon thin film transistor, like leakage current (On/Off state current), subthreshold swing, floating body effect (kink effect), self-heating effect, and short channel effect etc.. Thus, we propose and fabricate four kinds of novel structural polycrystalline silicon thin film transistors that are involved in the following, indicating to improve the critical issues of polycrystalline silicon thin film transistor mentioned above. 1. We propose and fabricate the multiple/dual trenched-body polycrystalline silicon thin film transistor. This proposed structure is demonstrated to obviously suppress the off-state leakage up to 70% reduction, comparing with the conventional device. Also, we survey the reliability of this proposed device included temperature and DC hot-carrier stress effects. We found that the trenched-body TFTs perform more rapid degradation than the conventional TFT does after the temperature and stress durations, but their electrical characteristics are still superior to the conventional counterparts. Importantly, we demonstrate that this proposed device have a dramatic potential to be a novel capacitorless 1T-DRAM, because of its large floating-body-charge storages. As the experiment, the large threshold voltage shift is examined apparently after a certain write and erase operations, leading to a manifest programming window. 2. We propose and fabricate the block-oxide polycrystalline silicon thin film transistor. This proposed structure can not only improve the leakage issue of conventional device seriously, but also avoid fluctuating threshold voltage attributed from the ultra-thin film effect. 3. We propose and fabricate the floating-body contact polycrystalline silicon thin film transistor. This structure is modified by the conventional contact window in order to effectively improve the kink effect, utilizing the bottom gate polycrystalline silicon thin film transistor. 4. Finally, we propose and simulate the non-continuous buried layer polycrystalline silicon thin film transistor. This structure built upon the field oxidation layer can effectively improve the self-heating effect and kink effect. Furthermore, this structure is simple to fabricate, practical, and completely compatible on CMOS technology.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0704108-121717 |
| Date | 04 July 2008 |
| Creators | Huang, Kuo-Dong |
| Contributors | Shu-Fen Hu, Yao-Tsung Tsai, Hsiung Chou, Ming-Kwei Lee, W. K. Yeh, A.K. Chu, Jyi-Tsong Lin, James B. Kuo, Meng-Hsueh Chiang |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | English |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0704108-121717 |
| Rights | withheld, Copyright information available at source archive |
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