Just-in-time adaptive disturbance estimation for run-to-run control in semiconductor processes

Description

Thesis (Ph. D.)--University of Texas at Austin, 2002. / Vita. Includes bibliographical references. Available also from UMI Company.

Links & Downloads

1. http://www.lib.utexas.edu/etd/r/d/2002/firthsk029/firthsk029.pdf#page=3
2. http://wwwlib.umi.com/cr/utexas/fullcit?p3110607

Tags

Semiconductors Semiconductor industry

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/54507444
Date	January 2002
Creators	Firth, Stacy Kay.
Source Sets	OCLC
Language	English
Detected Language	English