This study uses the Magnetohydrodynamics (MHD) method to simulate unsteady two-dimensional transport variables in argon (Ar) plasma, under low pressure, high density, and weak ionization between two infinite planar electrodes suddenly biased by a negative voltage. Plasma has been widely used in materials processing, thin film manufacturing, light source, nuclear fusion, and etching, etc. Properties of plasmas are also becoming important area for research in physics, chemistry, photonics, aerospace, engineering science and technology. Studying transport processes of plasmas therefore is important. This research consider by electric fields and magnetic fields, viscous, momentum exchange collisions between electrons ions and neutral particles. The computed results in this work quantitatively show density, velocity, electric potential, temperature, magnetic field, viscosity, thermal conductivity of the electrons ions and neutral particles across the sheath to the surfaces suddenly biased by a DC negative voltage. And increase of the boundary layer and sheath thickness. We can compare the theory and the simulation to know the behavior of the plasma near a surface.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0829112-143457 |
| Date | 29 August 2012 |
| Creators | Ye, Jyun-Wei |
| Contributors | Fei-Bin Hsiao, Peng-Sheng Wei, Jiin-Yuh Jang, Han-Taw Chen, Jeng-Rong Ho |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0829112-143457 |
| Rights | user_define, Copyright information available at source archive |
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