The properties of spin-on oxide in a mos system.

Description

Thesis (M.Phil.)--Chinese University of Hong Kong. / Bibliography: leaves 161.

Links & Downloads

1. cuhk:320945
2. http://library.cuhk.edu.hk/record=b5886739
3. http://repository.lib.cuhk.edu.hk/en/item/cuhk-320945

Tags

Silica

Silicon oxide films

Additional Fields

Identifer	oai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_320945
Date	January 1975
Contributors	Lam, Hau-chung., Chinese University of Hong Kong Graduate School. Division of Electronics.
Publisher	Chinese University of Hong Kong
Source Sets	The Chinese University of Hong Kong
Language	English
Detected Language	English
Type	Text, bibliography
Format	print, 3, 2, 1616, 6 leaves : ill., plates (part col.) ; 28 cm.
Rights	Use of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/)