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Simulation and Analysis on Physical Vapor Deposition of CuInSe2 Thin Film

Abstract
The objective of this proposed study is to develop the new material CuInSe2 for larger area, low cost and high efficiency commercial CuInSe2 based solar cell for the solar resource in Taiwan. Recently, The¢¹-¢»-¢¾2 ternary chalcopyrite semiconductors, CuMX2(M=In, Ga; X=Se, S) have received considerable potential for nonlinear optics and photovoltaic applications such as a promising material for solar cell. For the request of large area homogeneousness, the electrochemical atomic layer epitaxy (ECALE) and molecular beam epitaxy (MBE) are used to deposit and adjust the composition. The combination of the advantages of MBE and ECALE could produce the large area epitaxial layer and get the precise compositions of CuInSe2 films to obtain a high conversion efficiency for commercial solar cell applications.
For the study of large area CuInSe2 substrate, first, the electrochemical atomic layer epitaxy (ECALE) was applied to deposit a layer of CuInSe2 thin film on ITO substrate, and then the physical vapor deposition was applied for the annealing process to adjust the composition wanted. At last, a CuInSe2 epitaxial film was grown on the top of substrate under the MBE process. In addition, under the conditions of fixed In molecular beam flux and excess Se molecular beam flux, we can control the Cu/In composition ratio by changing Cu molecular beam flux to get stoichiometric and In-rich or Cu-rich epitaxial films, and predict the type of conductivity. It could be possible to obtain the high reproducibility and stability of the composition and properties of epilayers by controlling the growth parameters carefully.
Finally, We hope it can be used in the manufacture of solar cell and get large area high conversion efficiency.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0704102-142026
Date04 July 2002
CreatorsChen, Yu-Ting
ContributorsAine Hong, Wang-Chuang Kuo, Heng-Yi Ueng, Cheu-Pyeng Cheng
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageCholon
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0704102-142026
Rightswithheld, Copyright information available at source archive

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