<p>Chemical gas sensors can be used in a variety of applications such as process control, security systems and medical diagnosis. In the research for new functions and new sensing materials a “breadboard” would be useful. A technique that has been investigated for such a purpose is the grid-gate device which is a metal-oxide-semiconductor (MOS) based gas sensor. It is a MOS capacitor consisting of a passive grid-gate with depositions of sensing materials overlapping the grid. The measuring is carried out with a light addressable method called scanning light pulse technique (SLPT) which enables the detection of spatially distributed gas response.</p><p>A development of the grid-gate sensor would be to separate the sensing materials from the chip. In this thesis the aim was to see if this was possible by depositing the sensing material on a slide of micro pillars which was put on top of a biased grid-gate chip.</p><p>The test was made with palladium depositions in an ambient of synthetic air and 2500 ppm hydrogen, and the measuring technique was SLPT as for the preceding device.</p><p>The result of the test was that the new device showed a combined gas response of both charge content shift at flat-band voltage and at inversion voltages. The conclusion is therefore that the sensing material can be separated from the grid-gate chip and that the response will be caused by several mechanisms. The two-dimensional image response utilized for the preceding grid-gate device will instead be a multi-dimensional response consisting of the curve for the charge content shift at every measuring position.</p>
| Identifer | oai:union.ndltd.org:UPSALLA/oai:DiVA.org:liu-20691 |
| Date | January 2009 |
| Creators | Fallqvist, Amie |
| Publisher | Department of Physics, Chemistry and Biology |
| Source Sets | DiVA Archive at Upsalla University |
| Language | English |
| Detected Language | English |
| Type | Student thesis, text |
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