Abstract
The purpose of this thesis is to design and fabricate optical waveguide reflectors by using vertical mirror reflector. In order to reflect the incident optical mode of multi-mode interference coupler, we fabricate the etched vertical reflective mirror surface with dry etch processes. We used the design of etched vertical mirror surfaces to bend the incident optical mode, and changed the length of multi-mode interference coupler for the power splitting ratio and high power output. In order to make total internal reflection in vertical reflective mirror, we used ICP-RIE dry etching process to fabricate vertical and smooth mirror.
In this part of design the semiconductor optical filter, we design the 90o vertical mirror reflector and the length of MMI by using a 2¡Ñ2 multi-mode interference coupler to get the power splitter with coupling coefficient. We comprise the ring resonator by two vertical mirror reflector and bended waveguide to displace the cleaved of Fabry-Perot resonator in tradition.
In fabrication process, we using dry etching (ICP-RIE) process that is the plasma system high density in all part of this paper. first, we defined the device pattern by using photo-lithography technique in our sample . Second, we etched ridge waveguide by using dry etching ICP-RIE method. In order to decrease the scattering loss, we deep etched bended waveguide and the reflector. Then, we etched the reflector mirror by ICP-RIE dry etching process to get smoother surface. Finally, we used polyimide to flatten the sides of the ridge waveguide and evaporated metal electrode.
In the device characteristic, we get the waveguide loss in 35.68dB by Fabry-Perot resonator and a power splitter with 85 percent and 15 percent output. Finally, we could get a transmission frequency about 81GHz from optical transmission spectrum in the filter device.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0730108-123547 |
| Date | 30 July 2008 |
| Creators | Chiu, Ying-chen |
| Contributors | Shoou-jinn Chang, Tong-sheng Lay, Kuo-jui Lin, Wood-hi Cheng, Yi-Jen Chiu |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0730108-123547 |
| Rights | not_available, Copyright information available at source archive |
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