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Design and Testing of a Lateral Field Excited Rate Monitor for Use in Thin Film Deposition Systems

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1. http://www.library.umaine.edu/theses/pdf/SgambatoK2009.pdf

Identifer	oai:union.ndltd.org:MAINE/oai:theses.library.umaine.edu:ECE2009-003
Date	January 2009
Creators	Sgambato, Kristopher
Publisher	Fogler Library, University of Maine
Source Sets	University of Maine
Detected Language	English