by Sou Ka Hou. / On t.p. "2', "3", and "T" are subscript following "deposition of" in the title. / Parallel title in Chinese characters. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1992. / Includes bibliographical references (leaves [88]). / Chapter 1. --- Introduction --- p.1 / Chapter 2. --- Computer-controlled sputtering system for deposition of high Tc thin films --- p.10 / Chapter 2.1 --- Introduction --- p.10 / Chapter 2.2 --- Vacuum system --- p.12 / Chapter 2.3 --- Gas flow control --- p.16 / Chapter 2.3.1 --- Design --- p.16 / Chapter 2.3.2 --- Flow control --- p.18 / Chapter 2.4 --- Gas pressure control --- p.21 / Chapter 2.4.1 --- Gauges --- p.21 / Chapter 2.4.2 --- Control method --- p.21 / Chapter 2.5 --- "Sputtering, guns and deposition control" --- p.24 / Chapter 2.5.1 --- Types --- p.24 / Chapter 2.5.2 --- Orientation of the sputter gun --- p.26 / Chapter 2.5.3 --- Dual magnetron gun system --- p.26 / Chapter 2.5.4 --- Deposition control system --- p.27 / Chapter 2.6 --- Substrate holder and temperature control --- p.30 / Chapter 2.6.1 --- Substrate holder --- p.30 / Chapter 2.6.2 --- Substrate temperature control --- p.31 / Chapter 2.7 --- Interlock protection --- p.34 / Chapter 2.8 --- Control program --- p.35 / Chapter 3. --- The presputtering effect --- p.39 / Chapter 3.1 --- Presputtering effect (a review) --- p.39 / Chapter 3.2 --- Emission spectroscopy on sputtered materials --- p.48 / Chapter 3.3 --- Experimental --- p.49 / Chapter 3.4 --- Emission spectra --- p.53 / Chapter 3.4.1 --- Effect of sputter power source --- p.53 / Chapter 3.4.2 --- Effect of gas ratio --- p.58 / Chapter 3.4.3 --- Effect of gas pressure --- p.64 / Chapter 3.4.4 --- Study of presputtering effect --- p.67 / Chapter 3.4.5 --- Monitoring the evaporation rate by the spectral line intensities --- p.71 / Chapter 4. --- Conclusion and discussion --- p.75 / Chapter Appendix A. --- Motor control --- p.77 / Chapter Appendix B. --- Thin film deposition --- p.82
| Identifer | oai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_319030 |
| Date | January 1992 |
| Contributors | Sou, Ka Hou., Chinese University of Hong Kong Graduate School. Division of Physics. |
| Publisher | Chinese University of Hong Kong |
| Source Sets | The Chinese University of Hong Kong |
| Language | English |
| Detected Language | English |
| Type | Text, bibliography |
| Format | print, [4], 87, [1] leaves : ill. ; 30 cm. |
| Rights | Use of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/) |
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