The most commonly known macro scale probing devices are simply comprised
of metallic leads used for measuring electrical signals. On the other hand,
micromachined probing devices are realized using microfabrication techniques and are
capable of providing very fine, micro/nano scale interaction with matter; along with a
broad range of applications made possible by incorporating MEMS sensing and
actuation techniques. Micromachined probes consist of a well-defined tip structure that
determines the interaction space, and a transduction mechanism that could be used for
sensing a change, imparting external stimuli or manipulating matter.
Several micromachined probes intended for biological and nanotechnology
applications were fabricated, characterized and tested. Probes were developed under two
major categories. The first category consists of Micro Electromagnetic Probes for
biological applications such as single cell, particle, droplet manipulation and neuron
stimulation applications; whereas the second category targets novel Scanning Probe
topologies suitable for direct nanopatterning, variable resolution scanning probe/dip-pen
nanolithography, and biomechanics applications.
The functionality and versatility of micromachined probes for a broad range of
micro and nanotechnology applications is successfully demonstrated throughout the five
different probes/applications that were studied. It is believed that, the unique advantages
of precise positioning capability, confinement of interaction as determined by the probe
tip geometry, and special sensor/actuator mechanisms incorporated through MEMS
technologies will render micromachined probes as indispensable tools for microsystems
and nanotechnology studies.
| Identifer | oai:union.ndltd.org:tamu.edu/oai:repository.tamu.edu:1969.1/ETD-TAMU-2009-08-6966 |
| Date | 14 January 2010 |
| Creators | Yapici, Murat K. |
| Contributors | Zou, Jun |
| Source Sets | Texas A and M University |
| Language | en_US |
| Detected Language | English |
| Type | Book, Thesis, Electronic Dissertation |
| Format | application/pdf |
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