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On Dual Actuation in Atomic Force Microscopes

In this paper, the problem of dual actuation in the atomic force microscope (AFM) is analyzed. The use of two actuators to balance the trade-off between bandwidth, range, and precision has been recently extended to nano-positioning systems. Despite existing demands, this concept undergoes fundamental limitations towards its extension to AFMs. This is attributed to the non-conventional requirement imposed on the control signal response, as it used to create the image of the characterized surface. / Singapore-MIT Alliance (SMA)

Identiferoai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/3914
Date01 1900
CreatorsEl Rifai, Khalid, El Rifai, Osamah M., Youcef-Toumi, Kamal
Source SetsM.I.T. Theses and Dissertation
Languageen_US
Detected LanguageEnglish
TypeArticle
Format324338 bytes, application/pdf
RelationInnovation in Manufacturing Systems and Technology (IMST);

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