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Studies on the elimination of volatile organic compounds in industry waste gas streams

This study aimed to develop a biofilter packed only with fern chips for the removal of air-borne low concentration VOCs (volatile organic compounds) emitted from various industries such as semiconductor manufacturing and electronic ones. The fern chip biofilters could avoid the shortcomings of traditional media, such as compaction, drying, and breakdown, which lead to the performance failure of the biofilters.
The study contains two topics. The first is a performance test on the elimination of mixed VOCs used in semiconductor manufacturing industries in an air stream. The second is the one on the elimination of a single VOC (methyl ethyl ketone) in a waste gas drawn from a CCL (copper clad laminate) plant.
Two pilot-scale biofilters consisted of two columns (0.40 mW¡Ñ0.40 mL¡Ñ0.70 mH acrylic column) arranged in series were used for the performance tests. Each of the two columns was packed with fern chips to a packing volume of around 56 L (0.40 mW¡Ñ0.40 mL¡Ñ0.35 mH). A sprinkler was set over the packed fern chips for providing them with water and nutrition solutions. Liquid leached from both layers of chips were collected in the bottom container of the column.
In the first topic, tests were performed for biofiltration removal of VOCs in simulated semiconductor manufacturing emitted gases which consisted of IPA (isopropyl alcohol), acetone, HMDS (hexamethylene disilazane), PGME (propylene glycol monomethyl ether), and PGMEA (propylene glycol monomethyl ether acetate). From the results, it could be proposed that for achieving over 94% of the VOC removal, appropriate operation conditions are media moisture content = 52-68%, media pH = 7-8, influent VOC concentration = 150-450 mg/Am3, empty bed residence time (EBRT) = 0.75 min, and volumetric organic loading L to the whole media = 11.4-34.1 g/m3.h.
In the second topic, performances of biofiltration for the removal of methyl ethyl ketone (MEK) in a gas stream from a copper clad laminate (CCL) manufacturing process were tested. Experimental results indicate that with L of <115 g /m3.h., EBRT = 0.5-1.28 min , media pH = 5.3-6.8, influent MEK concentration = 215-1,670 mg/Am3, MEK removal efficiencies of over 91% were obtained. Instant milk powder was essential to the good and stable performance of the biofilter for MEK removal.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0817110-132307
Date17 August 2010
CreatorsLi, Shang-Chuan
Contributorsnone, none, shin@mail.nsysu.edu.tw, C. M. Kao, Chen, Kang-Shin
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageEnglish
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0817110-132307
Rightsunrestricted, Copyright information available at source archive

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