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Numerical heat transfer during partially-confined, confined, and free liquid jet impingement with rotation and chemical mechanical planarization process modeling

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1. http://scholarcommons.usf.edu/etd/2054
2. http://scholarcommons.usf.edu/cgi/viewcontent.cgi?article=3053&context=etd

Identifer	oai:union.ndltd.org:USF/oai:scholarcommons.usf.edu:etd-3053
Date	01 June 2009
Creators	Lallave-Cortes, Jorge C
Publisher	Scholar Commons
Source Sets	University of South Flordia
Detected Language	English
Type	text
Format	application/pdf
Source	Graduate Theses and Dissertations
Rights	default