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Micromachined piezoresistive single crystal silicon cantilever sensors

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1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.242637

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:242637
Date	January 1997
Creators	Su, Yi
Publisher	University of Southampton
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation