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Measurement and simulation of ion energy distributions in a reactive ion etcher

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1. https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.240060

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:240060
Date	January 1994
Creators	Dickenson, Andrew C.
Publisher	University of Bristol
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation
Source	http://hdl.handle.net/1983/2e692fca-5cd1-48da-bb7e-6bb76a1bb23b