A hybrid physical vapor deposition- electron cyclotron resonance-chemical vapor deposition (PVD-ECRCVD) coating system HBS900 is used to deposit the diamond-like carbon (DLC) film on the microdrills. It could keep friction low
results in improving the productivity of the drill holes on the printed circuit board (PCB). In order to improve the adhesion strength of the DLC films,functionally gradient Ti/TiN/TiCN supporting multilayer were pre-deposited
initially on the microdrills. The hard coatings of titanium nitride (TiN) and titanium carbonitride (TiCN) as multilayer are deposited by PVD with high rate coating sources based on the principle of electrical arc vaporization and magnetron sputtering process. The on it following dry lubricant coating is composed of amorphous, diamond like carbon (DLC) deposited by ECRCVD plasma in the same recipient. The structural characteristics of DLC films were investigated by Raman spectroscopy and standard scratch and pin-on-disk test.The properties of DLC films coating on the microdrills are obtained and summarized as follows: excellent adhesion 65N, and coefficients of friction less than 0.15. After micro-hole drilling, we obtained the high quality drilled hole from the inspection of roughness and nailheading. As a result of adapting a
microdrill coated with DLC film, the drilling lifetime was significantly improved
to reach about 2.5 times than that of the uncoated one.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0705104-203309 |
| Date | 05 July 2004 |
| Creators | Lie, Sim-hong |
| Contributors | none, Cheu-pheng Cheng, none, Wang-cheung Kuo, H. Y. Ueng |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0705104-203309 |
| Rights | not_available, Copyright information available at source archive |
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