Chemnitz, Techn. Universiẗat, Diss., 2002. / Dateiformat: PDF.

A hybrid physical vapor deposition- electron cyclotron resonance-chemical vapor deposition (PVD-ECRCVD) coating system HBS900 is used to deposit the diamond-like carbon (DLC) film on the microdrills. It could keep friction low results in improving the productivity of the drill holes on the printed circuit board (PCB). In order to improve the adhesion strength of the DLC films,functionally gradient Ti/TiN/TiCN supporting multilayer were pre-deposited initially on the microdrills. The hard coatings of titanium nitride (TiN) and titanium carbonitride (TiCN) as multilayer are deposited by PVD with high rate coating sources based on the principle of electrical arc vaporization and magnetron sputtering process. The on it following dry lubricant coating is composed of amorphous, diamond like carbon (DLC) deposited by ECRCVD plasma in the same recipient. The structural characteristics of DLC films were investigated by Raman spectroscopy and standard scratch and pin-on-disk test.The properties of DLC films coating on the microdrills are obtained and summarized as follows: excellent adhesion 65N, and coefficients of friction less than 0.15. After micro-hole drilling, we obtained the high quality drilled hole from the inspection of roughness and nailheading. As a result of adapting a microdrill coated with DLC film, the drilling lifetime was significantly improved to reach about 2.5 times than that of the uncoated one.

また、この研究は、特定の動作条件で生成されたシートプラズマで、プラズマやシートプラズマの寸法を決定する動作パラメータなどのプラズマ条件を理解し、最適化パラメータと将来の産業用アプリケーションの条件を導き出すことも目的としています。 そのため、この研究は、表面技術アプリケーション用のシートプラズマデバイスの開発と理解に貢献することを試みています。 / Sheet plasmas have the advantage of producing thin films and functional surfaces by generating localized high-density and temperature gradient regions suitable for specific reactions. A stream of high energy electrons from a plasma cathode efficiently excites and/or ionizes atomic and molecular species which are confined in a linear magnetic field. An electron cyclotron resonance (ECR) sheet plasma device employing a 2.45 GHz microwave source and combination of permanent magnets and field coils was designed and operated. The combined field realized a linear magnetic field that sustained a rectilinear confinement of the plasma. / 博士(工学) / Doctor of Philosophy in Engineering / 同志社大学 / Doshisha University

Práce rozebírá logistické technologie, podrobněji Efficient Consumer Response. Zabývá se příčinami vzniku, stručnou historií, prvky, přínosy pro podniky a implementací ECR v podniku. Cílem práce je ukázat, jak ECR funguje a jak je uplatňováno v praxi u výrobních i obchodních společností, jak ECR vnímají koneční zákazníci, a jak by při zavádění technologie měly postupovat podniky, které s ECR nemají zkušenosti.

Zugl.: Lüneburg, Univ., Diss., 2001

Thesis (doctoral)--Universität Stuttgart, 1995.

Stuttgart, Univ., Diss., 1999.

Zugl.: Wien, Wirtschaftsuniv., Diss., 2008.

Teilw. zugl.: Lüneburg, Univ., Diss., 2001

DLC exhibits an extreme hardness, chemical stability and optical transparency properties, which are, to a certain extent, similar to those of diamond and thus of technological importance. In the case of amorphous hydrogenated carbon (a-C:H) films they can be interpreted as intermediate between diamond, graphite, and polymer-like carbon sites. The most important intrinsic hardness is protection of tools or machine parts against wear. Most modifications have been used on DLC to enhanced mechanical properties, such as reducing its internal compressive stress (N, Si, and metal incorporation), or to reduce its surface energy for further lowering of its already low friction coefficient with 0.1. Among various deposition techniques, microwave generated discharges, especially electron cyclotron resonance (ECR) plasmas, develop excellent a high degree of ionization, high ions densities. In this work, a novel hybrid technique for diamond-like carbon (DLC) film deposition has been developed, which combines the microwave ECR plasma discharging C2H2 and metallic magnetron sputtering. The effects of negative bias voltage and hydrocarbon flow rate for the deposition of a-C:H films on high speed steel were examined by Raman spectra, and their hardness was investigated by the Rockwell method. The Raman spectra show that at different hydrocarbon flow rate, the variation of the G line peak and width, and the integrated intensity ratio ID/IG of DLC and graphic, correlate well with the film hardness. Consequently, we suggest a deposition mechanism of DLC for this combined method.