Optimalization of PLD deposition of YSZ for micr-SOFC electrolyte applications by varying deposition pressure and target-substrate distance.Substrate used was Si-based chips and wafers (large area PLD), and the substrate temperature was held at 600. Dense films were obtained at 20 mTorr.
| Identifer | oai:union.ndltd.org:UPSALLA1/oai:DiVA.org:ntnu-19017 |
| Date | January 2012 |
| Creators | Krogstad, Hedda Nordby |
| Publisher | Norges teknisk-naturvitenskapelige universitet, Institutt for materialteknologi, Institutt for materialteknologi |
| Source Sets | DiVA Archive at Upsalla University |
| Language | English |
| Detected Language | English |
| Type | Student thesis, info:eu-repo/semantics/bachelorThesis, text |
| Format | application/pdf |
| Rights | info:eu-repo/semantics/openAccess |
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