This thesis is aimed at preparation of thin plasma-polymerized films deposited on glass fibers by Plasma-Enhanced Chemical Vapor Deposition (PE CVD) from a mixture of tetravinylsilane (TVS) and oxygen gas. Plasma-polymerized films which were deposited on silicon wafers were used to characterize chemical properties and optimization of deposition process with respect to reproducibility.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:216223 |
| Date | January 2008 |
| Creators | Veteška, Jaromír |
| Contributors | Salyk, Ota, Čech, Vladimír |
| Publisher | Vysoké učení technické v Brně. Fakulta chemická |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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