In this thesis, the details of the design, fabrication, and characterization of an optical, integrated hydrogen gas and temperature sensor are explored. The hydrogen sensor is implemented by
coating a ridge waveguide with a thin layer of palladium and shows very good response time and detection response for hydrogen concentrations ranging from 0.5-4%, both of which compare very favourably to similar existing technologies. Multiple film thicknesses were tested and it
was found that thinner films give a faster response time at the expense of a reduced detection
response. The temperature sensor is implemented with a multi-mode interferometer coupled ring resonator and has a sensing range of 100 K with good sensitivity. Both sensors are fabricated on a silicon-on-insulator platform and could easily be integrated together onto a single chip as part of an optical nose technology that would have the ability to sense multiple environmental factors simultaneously.
| Identifer | oai:union.ndltd.org:TORONTO/oai:tspace.library.utoronto.ca:1807/42765 |
| Date | 21 November 2013 |
| Creators | Carriere, Nicholas |
| Contributors | Aitchison, J. Stewart |
| Source Sets | University of Toronto |
| Language | en_ca |
| Detected Language | English |
| Type | Thesis |
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