Diffusion of adsorbed n-alkanes was studied by means of electron beam induced deposition
(EBID) technique. Carbon ring-like and pillar-like deposits were produced on bulk and thin
substrates in a scanning electron microscope (SEM) operated in a “spot” mode. Residual nalkanes
used as a precursor gas were delivered to the beam interaction region (BIR) via surface
diffusion.
The model of adsorbate diffusion along a heterogeneous surface with different diffusion
coefficients D1 and D2 outside and inside the BIR, respectively, was proposed to explain the
measured deposition rates. The estimates for diffusion coefficients ranging from ~1x10-10 to
~1x10-7 cm2s-1 at room temperature on surfaces with different roughness were obtained. These
estimates most likely should be attributed to n-decane molecules expected to play the key role in
the deposition process. Clusters of polymerized molecules produced by irradiation were assumed
to act as effective traps hampering surface diffusion. For high D1/D2 ratios the deposition rates
were found to be practically independent of the substrate material and initial roughness.
| Identifer | oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:31639 |
| Date | 13 September 2018 |
| Creators | Zhdanov, Gleb S., Lozhkin, Maksim S. |
| Source Sets | Hochschulschriftenserver (HSSS) der SLUB Dresden |
| Language | English |
| Detected Language | English |
| Type | info:eu-repo/semantics/acceptedVersion, doc-type:article, info:eu-repo/semantics/article, doc-type:Text |
| Rights | info:eu-repo/semantics/openAccess |
| Relation | 8, urn:nbn:de:bsz:15-qucosa2-315695, qucosa:31569 |
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