Indium Tin Oxide (ITO) Films (1800¡Ó100Å) were deposited onto the glass substrate by RF reactive magnetron sputtering method at room temperature. The electrical properties and optical properties measured before and after post-annealing of different temperature in vacuum. The sheet resistance of ITO Films which deposited at room temperature was about 36.8£[/¡¼, and we could obtain high conductive 14.7£[/¡¼ using the conduction of vacuum post-annealing at the temperature of 250¢XC. The X-ray diffraction (XRD) data show polycrystalline films after post-annealing with grain orientations predominantly along (222) and (400) directions depend on temperature. Atomic force microscope (AFM) and scanning electron microscopy (SEM) show the analysis of surface roughness and surface structure. The transparent was above 80% before and after post-annealing. The refractive index vary from 2.05 to 1.87 by using Ellipsometer.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0718106-143731 |
| Date | 18 July 2006 |
| Creators | Chen, Yi-Fan |
| Contributors | Yu-Kai Han, Wen-Jun Zheng, Ann-Kuo Chu, Mei-Ying Chang |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0718106-143731 |
| Rights | not_available, Copyright information available at source archive |
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