Optimalization of PLD deposition of YSZ for micr-SOFC electrolyte applications by varying deposition pressure and target-substrate distance.Substrate used was Si-based chips and wafers (large area PLD), and the substrate temperature was held at 600. Dense films were obtained at 20 mTorr.
Identifer | oai:union.ndltd.org:UPSALLA1/oai:DiVA.org:ntnu-19017 |
Date | January 2012 |
Creators | Krogstad, Hedda Nordby |
Publisher | Norges teknisk-naturvitenskapelige universitet, Institutt for materialteknologi, Institutt for materialteknologi |
Source Sets | DiVA Archive at Upsalla University |
Language | English |
Detected Language | English |
Type | Student thesis, info:eu-repo/semantics/bachelorThesis, text |
Format | application/pdf |
Rights | info:eu-repo/semantics/openAccess |
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