MEMS process offers many advantages that the microsystem can be downscaled and can be combined with integrated circuit (IC). This technique has been successfully applied to micromotor, micropump, and microelectric apparatus but there has been existing problems of independent and compact power supply system. Hence this study presents an electromagnetic rotary microgenerator, mainly consisting of multilayer planar Cu microcoil and multipolar hard magnet of Nd/Fe/B by sintering. The layout of the microgenerator is 9 9 1 mm3 in volume. The paper also presents design and analysis of a multipolar rotary electromagnetic microgenerator. Theoretical mathematic model is derived to predict the power generation. Experimental results are compared with simulations. The experimental result shows good agreement with simulations. The preliminary experimental result reveals that this microgenerator with eight magnet poles and four-layer Cu planar microcoil generates an output voltage of 569 mV at 213.7 Hz frequency.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0701105-120522 |
| Date | 01 July 2005 |
| Creators | Wu, Tsung-Tien |
| Contributors | Sheng-Chih Shen, Cheng-Tang Pan, Yeong-Maw Hwang, Shin-Pon Ju, Che-Hsin Lin |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0701105-120522 |
| Rights | restricted, Copyright information available at source archive |
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