MEMS process offers many advantages that the microsystem can be downscaled and can be combined with integrated circuit (IC). This technique has been successfully applied to micromotor, micropump, and microelectric apparatus but there has been existing problems of independent and compact power supply system. Hence this study presents an electromagnetic rotary microgenerator, mainly consisting of multilayer planar Cu microcoil and multipolar hard magnet of Nd/Fe/B by sintering. The layout of the microgenerator is 9 9 1 mm3 in volume. The paper also presents design and analysis of a multipolar rotary electromagnetic microgenerator. Theoretical mathematic model is derived to predict the power generation. Experimental results are compared with simulations. The experimental result shows good agreement with simulations. The preliminary experimental result reveals that this microgenerator with eight magnet poles and four-layer Cu planar microcoil generates an output voltage of 569 mV at 213.7 Hz frequency.

Esta Tese apresenta o desenvolvimento de um protótipo de um microgerador termoelétrico para captação de energias residuais baseado no Efeito Seebeck com sistema de transferência de calor intercambiável. Neste sentido, desenvolveu-se dois sistemas de transferência térmica, sendo um para captação do calor residual de processos industriais constituído por um módulo denominado captor de calor intercambiável e por outro módulo para resfriar o sistema. Destaca-se que o sistema térmico desenvolvido permite a sua adaptação ao processo industrial por meio da troca do captor de calor, otimizando a transferência térmica para o microgerador termoelétrico. Com base nos dados medidos fez se um tratamento dos dados obtendo-se uma tensão de circuito aberto de Vopen=0,4306xΔT [mV] e uma resistência interna de R0=9,41Ω, com uma tolerância de ΔRint=0,77Ω tal que Rint=R0±ΔRint=9,41±0,77Ω. As medições feitas com a condição de máxima potência de saída foi obtida em um gradiente de temperatura de ΔT=80°C resultando numa potência máxima Pout≈29W. Como resultado obteve-se o protótipo de um microgerador termoelétrico baseado no Efeito Seebeck para captação de energias residuais, customizado e adaptado às características do processo industrial e à respectiva carga (potência e tensão), permitindo a troca e alteração da configuração do sistema de transferência de calor bem como, a reconfiguração do arranjo dos módulos termoelétricos. / This thesis presents the development of a prototype of a thermoelectric microgenerator to energy harvesting based on the Seebeck Effect with interchangeable heat transfer system. In this sense, it developed two heat transfer systems, one for capture of waste heat from industrial processes consisting of a sensor module called interchangeably heat and cool the module to another system. It is noteworthy that the thermal system developed allows its adaptation to industrial process by exchanging the sensor heat, optimizing heat transfer to the thermocouple microgenerator. Based on measured data has a data processing yielding a open circuit voltage of Vopen=0,4306xΔT and an internal resistance of R0=9,41Ω, with a tolerance of ΔRint=0,77Ω such that Rint=R0±ΔRint=9,41±0,77Ω. The measurements made on the condition of maximum output was obtained at a temperature gradient of ΔT=80°C resulting in a maximum power Pout≈29W. As a result we obtained a prototype thermoelectric microgenerator based on Seebeck effect to energy harvesting, energy customized and adapted to the characteristics of industrial process and its load (power and voltage), allowing the exchange and change the configuration of the transfer system heat as well as reconfiguring the arrangement of thermoelectric modules.

Esta Tese apresenta o desenvolvimento de um protótipo de um microgerador termoelétrico para captação de energias residuais baseado no Efeito Seebeck com sistema de transferência de calor intercambiável. Neste sentido, desenvolveu-se dois sistemas de transferência térmica, sendo um para captação do calor residual de processos industriais constituído por um módulo denominado captor de calor intercambiável e por outro módulo para resfriar o sistema. Destaca-se que o sistema térmico desenvolvido permite a sua adaptação ao processo industrial por meio da troca do captor de calor, otimizando a transferência térmica para o microgerador termoelétrico. Com base nos dados medidos fez se um tratamento dos dados obtendo-se uma tensão de circuito aberto de Vopen=0,4306xΔT [mV] e uma resistência interna de R0=9,41Ω, com uma tolerância de ΔRint=0,77Ω tal que Rint=R0±ΔRint=9,41±0,77Ω. As medições feitas com a condição de máxima potência de saída foi obtida em um gradiente de temperatura de ΔT=80°C resultando numa potência máxima Pout≈29W. Como resultado obteve-se o protótipo de um microgerador termoelétrico baseado no Efeito Seebeck para captação de energias residuais, customizado e adaptado às características do processo industrial e à respectiva carga (potência e tensão), permitindo a troca e alteração da configuração do sistema de transferência de calor bem como, a reconfiguração do arranjo dos módulos termoelétricos. / This thesis presents the development of a prototype of a thermoelectric microgenerator to energy harvesting based on the Seebeck Effect with interchangeable heat transfer system. In this sense, it developed two heat transfer systems, one for capture of waste heat from industrial processes consisting of a sensor module called interchangeably heat and cool the module to another system. It is noteworthy that the thermal system developed allows its adaptation to industrial process by exchanging the sensor heat, optimizing heat transfer to the thermocouple microgenerator. Based on measured data has a data processing yielding a open circuit voltage of Vopen=0,4306xΔT and an internal resistance of R0=9,41Ω, with a tolerance of ΔRint=0,77Ω such that Rint=R0±ΔRint=9,41±0,77Ω. The measurements made on the condition of maximum output was obtained at a temperature gradient of ΔT=80°C resulting in a maximum power Pout≈29W. As a result we obtained a prototype thermoelectric microgenerator based on Seebeck effect to energy harvesting, energy customized and adapted to the characteristics of industrial process and its load (power and voltage), allowing the exchange and change the configuration of the transfer system heat as well as reconfiguring the arrangement of thermoelectric modules.

Esta Tese apresenta o desenvolvimento de um protótipo de um microgerador termoelétrico para captação de energias residuais baseado no Efeito Seebeck com sistema de transferência de calor intercambiável. Neste sentido, desenvolveu-se dois sistemas de transferência térmica, sendo um para captação do calor residual de processos industriais constituído por um módulo denominado captor de calor intercambiável e por outro módulo para resfriar o sistema. Destaca-se que o sistema térmico desenvolvido permite a sua adaptação ao processo industrial por meio da troca do captor de calor, otimizando a transferência térmica para o microgerador termoelétrico. Com base nos dados medidos fez se um tratamento dos dados obtendo-se uma tensão de circuito aberto de Vopen=0,4306xΔT [mV] e uma resistência interna de R0=9,41Ω, com uma tolerância de ΔRint=0,77Ω tal que Rint=R0±ΔRint=9,41±0,77Ω. As medições feitas com a condição de máxima potência de saída foi obtida em um gradiente de temperatura de ΔT=80°C resultando numa potência máxima Pout≈29W. Como resultado obteve-se o protótipo de um microgerador termoelétrico baseado no Efeito Seebeck para captação de energias residuais, customizado e adaptado às características do processo industrial e à respectiva carga (potência e tensão), permitindo a troca e alteração da configuração do sistema de transferência de calor bem como, a reconfiguração do arranjo dos módulos termoelétricos. / This thesis presents the development of a prototype of a thermoelectric microgenerator to energy harvesting based on the Seebeck Effect with interchangeable heat transfer system. In this sense, it developed two heat transfer systems, one for capture of waste heat from industrial processes consisting of a sensor module called interchangeably heat and cool the module to another system. It is noteworthy that the thermal system developed allows its adaptation to industrial process by exchanging the sensor heat, optimizing heat transfer to the thermocouple microgenerator. Based on measured data has a data processing yielding a open circuit voltage of Vopen=0,4306xΔT and an internal resistance of R0=9,41Ω, with a tolerance of ΔRint=0,77Ω such that Rint=R0±ΔRint=9,41±0,77Ω. The measurements made on the condition of maximum output was obtained at a temperature gradient of ΔT=80°C resulting in a maximum power Pout≈29W. As a result we obtained a prototype thermoelectric microgenerator based on Seebeck effect to energy harvesting, energy customized and adapted to the characteristics of industrial process and its load (power and voltage), allowing the exchange and change the configuration of the transfer system heat as well as reconfiguring the arrangement of thermoelectric modules.

In this master’s thesis gives an overview of the finite element method (FEM) as used in electrotechnical practice. It deals with calculations of electric and magnetic fields. The task can be solved using ANSYS, FemLab, Femm, Quickfield and next software. Femm is the one I have chosen. The programs are described here, and their use is demostrated on examples. The outcome of the project is a calculation of magnetic field of a microgenerator in a stationary and dynamic field.

This master’s thesis deals with energy harvesting from the mechanical energy sources. The mechanical energy may be converted into the electrical by means of a vibrational microgenerator. The thesis deals also with the production of energy from different renewable sources. There have been identified conditions for effective transformation of the remaining energy. In order to satisfy these conditions a circuit for load matching to energy harvester has to be used. Four variants of matching circuit have been designed and analyzed in PSpice or LTspice. It has been designed a system of power factor correction controlled by circuit with discrete components and also by microcontroller. For one of these variants a specific integrated circuit has been used. The designed circuits have been built and their parameters haven been determined by measurement.

La récupération d’énergie thermique peut être réalisée par de nombreuses techniques de transduction d’énergie. Les techniques directes de conversion d’énergie thermique en énergie électrique sont généralement les technologies les plus utilisées. Lorsque des générateurs miniaturisés son requis, des méthodes directes de conversion présentent des difficultés, y compris la nécessité des dissipateurs de chaleur volumineux ou la forte dépendance aux fluctuations de température rapides. Donc, les méthodes de conversion indirecte, comme la conversion d’énergie thermique à mécanique et puis mécanique à électrique sont présentées comme des alternatives aux récupérateurs d’énergie. Cette technologie ouvre une nouvelle ligne de recherche pour surmonter les contraintes des récupérateurs d’énergie à petite échelle. Même si leur rendement est relativement faible en raison des pertes liées aux étapes de conversion d’énergie, les générateurs d’énergie basés sur l’effet thermomagnétique présentent une densité de puissance élevée lors de leur miniaturisation. Néanmoins, peu de recherches sur la récupération d’énergie thermomagnétique à petite échelle ont été menées et aucune étude de faisabilité industrielle n’a été signalée jusqu’à présent. Ces travaux présentent la conception d’un générateur capable de convertir de faibles et de lentes fluctuations de température ambiante en électricité. L’effet thermomagnétique d’un matériau magnétique doux, à savoir l’alliage de fer et de nickel (FeNi) ainsi que la piézoélectricité sont la base de fonctionnement du dispositif. Cette thermo-magnétisation entraîne la conversion d’énergie thermique, sous la forme de fluctuations temporelles, en vibrations mécaniques d’une structure. La structure consiste en un bimorphe piézoélectrique (PZT). Le générateur a deux positions stables; la position ouverte et celle fermée. En modifiant la température de FeNi, l’interaction entre deux forces du système (forces magnétique et mécanique) amène le générateur à l’une de ses deux commutations. La température de Curie du FeNi étant proche de la température ambiante, des applications comme des dispositifs connectés portables peuvent être ciblées. Un modèle analytique est développé. Donc, une conception rapide du générateur est réalisée pour répondre aux cahiers des charges tels que: la température d’opération, la plage de températures, la réponse thermique, les capacités de conversion piézoélectrique, etc. De plus, des règles de conception ont été dérivées envers la réduction de la taille du générateur. Des modélisations par éléments finis sont développés sous ANSYS afin de valider notre modèle analytique simplifié. Ces modèles permettent aux concepteurs d’explorer d’autres matériaux et de faire des améliorations en utilisant des processus d’optimisation de la conception. Des prototypes des récupérateurs d’énergie atteignent des densités de puissance de 0.6μWcm^−3 pendant des commutations d’ouverture à 40°C et 0.02μWcm^−3 pendant des commutations de fermeture à 28°C. En réduisant la taille du générateur, des commutations d’ouverture à 31°C et des commutations de fermeture à 27°C, sont atteints. La distance initiale de séparation entre l’aimant permanent et l’alliage magnétique doux est identifiée comme une clé pour augmenter la capacité de conversion d’énergie du générateur. Un modèle équivalent électrique du générateur est développé afin de concevoir un circuit d’extraction d’énergie ainsi qu’un module de gestion d’énergie. Ce circuit est développé sous PSpice, permettant de mettre en œuvre des pertes liées aux matériaux (pertes mécaniques et diélectriques). Par le biais d’ajustement de courbe, ce modèle est capable de calculer des valeurs de pertes. Une analyse de la variabilité de la conception est réalisée afin d’explorer la faisabilité industrielle d’un tel générateur. Ainsi, la récupération d’énergie thermomagnétique peut concourir, pour la première fois, avec les thermo-générateurs les plus modernes. / Thermal energy harvesting can be realized by numerous techniques of energy transduction. Direct conversions of thermal to electrical energy are typically the most popular technologies used. When miniaturized generators are required, direct conversion methods present difficulties, including the need of bulky heat sinks or the strong dependence to rapid temperature fluctuations. Therefore, indirect conversion methods, like thermal-to-mechanical-to-electrical energy are presented as an alternative to thermal energy harvesters towards powering autonomous sensors. This disruptive technology opens up a new approach to overcome the limitations of miniaturized thermal energy harvesting systems. Even if having a relatively low efficiency due to losses linked to energy conversion steps, energy harvesters based on thermo-magnetic effect show a large power density upon miniaturization. Nevertheless, little research on thermo-magnetic energy harvesting at miniature scale has been conducted and no competitive electrical output has been reported until now.This work presents the design of a generator able to convert small and slow ambient temperature fluctuations into electricity. It exploits the thermo-magnetic effect of a soft magnetic material, namely, iron nickel alloy (FeNi) and piezoelectricity. Thermo-magnetization of FeNi is driving the conversion of thermal energy, in the form of temporal fluctuations, into mechanical vibrations of a structure. The structure consists in a piezoelectric bimorph (PZT) cantilever beam. The generator has two stable positions; open position and closed one. Curie temperature of FeNi being near to ambient temperature, applications like wearable connected devices may be targeted. By changing the temperature of the soft magnetic alloy, the interaction between counterbalance forces (magnetic and mechanical forces) leads the generator to one of its two commutations.Analytical model is developed in order to predict generator performance. Making use of this model, a rapid design of generator is conducted to fit custom requirements such as: temperature of operations, temperature range of operation, thermal response, piezoelectric energy conversion capabilities, etc.Additionally, main design rules were derived from the design parameters of the generator. Special attention was paid on how scaling down size affects the generator performance by using the analytical model.Finite element models are developed through ANSYS software in order to validate the analytical simplified model. They couple the thermal to magnetic field and then mechanical to electrical energy conversion is solved. This model allows designers to explore other materials and do improvements by using design optimization processes.First generation energy harvesting demonstrators achieve power densities of 0.6µWcm^-3 during opening commutations around 40°C and 0.02µWcm^-3 at closing commutations around 28°C. By reducing the generator’s size opening commutations at 31°C while closing commutations at 27°C are achieved. By modifying design parameters such as initial distance of separation between the permanent magnet and soft magnetic alloy is identified as a key to boost the energy conversion capability of the generator. Finally, electrical equivalent model of this thermo-magnetically activated piezoelectric generator is developed to design an energy extraction circuit and power management module. This circuit is developed in a unique software PSpice, to implement losses linked to materials (mechanic and dielectric losses). Making use of curve fitting processes, this model is able to find losses values. A variability analysis of the design is conducted by using the analytical model through Matlab in order to explore the feasibility of producing such a generator industrially. Thus, thermo-magnetic energy harvesting can compete for the first time with the state-of-the-art thermos-electrics.

Les progrès réalisés dans les processus de fabrication ont mené vers un contrôle accru des dimensions et de la composition chimique des nanostructures, permettant l’émergence de nouveaux dispositifs appelés Nanosystèmes ElectroMécaniques ou NEMS. Outre leurs propriétés physiques originales, leurs dimensions réduites leurs confèrent un fonctionnement peu coûteux en énergie Ainsi, l’utilisation de l’environnement de tels dispositifs comme source d’énergie est possible. Afin de préserver les avantages liés aux dimensions des NEMS, le système de récupération d’énergie doit présenter un volume réduit. Dans ce contexte, nous étudions les nanoffis de ZnO comme éléments actifs de micro et nanosystèmes de récupération d’énergie à travers deux modèles physiques de nanofils. L’originalité de ces deux modèles vient de la prise en compte du couplage entre les propriétés piezoélectriques et les propriétés semiconductrices du ZnO et de ses effets dans la conversion électromécanique de l’énergie. / Recent progresses in manufacturing processes allow a better control of dimensions and chemical composition of nanostructures, This leads to the emergence of a new family of devices known as Nano ElectroMechanical Systems or NEMS. These devices show novel physical properties and functional characteristics due to their reduced size. Besides, their operating power consumption are tiny, making the use of their environment as energy source highly attractive. The design of a generator that scavenge the surrounding energy of the NEMS is quite a challenge; indeed, such a microharvester should be small enough to ensure that the dimensions of the whole autonomous device are still acceptable. in that context, we investigate ZnO nanowires as active elements of piezoelectric nano and microgenerator. We have specially developed two models of nanowire that take into account of the piezoelectric-semiconducting coupling to appreciate its effects on the electromechanical conversion of energy.