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Incorporation of air-filled pores/forms in a polyimide/benzocyclobutene matrix using a sacrifical commerical polymer for low K microelectronic applications

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Identiferoai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/19101
Date12 1900
CreatorsWilliamson, Jaimal Mallory
PublisherGeorgia Institute of Technology
Source SetsGeorgia Tech Electronic Thesis and Dissertation Archive
Detected LanguageEnglish
TypeThesis
RightsAccess restricted to authorized Georgia Tech users only.

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