Materials for advanced microlithography polymers for 157 nm lithography and acid diffusion measurements /

Description

Thesis (Ph. D.)--University of Texas at Austin, 2002. / Vita. Includes bibliographical references. Available also from UMI Company.

Links & Downloads

1. http://repositories.lib.utexas.edu/bitstream/handle/2152/1001/tranh022.pdf
2. http://wwwlib.umi.com/cr/utexas/fullcit?p3086720

Tags

Microlithography Polymers.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/57070255
Date	January 2002
Creators	Tran, Hoang Vi.
Source Sets	OCLC
Language	English
Detected Language	English