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The lithographic behaviour and the mechanisms of radiation-induced crosslinking and main-chain scission of chlorinated polymethylstyrenes

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Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:235981
Date January 1989
CreatorsMatsubayashi, Yoshiaki
PublisherUniversity of Kent
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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