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Aufbau einer Interferenzlithografie-Anlage zur Herstellung photonischer Kristalle

Multiple laser beam interference allows to produce periodic light patterns in the order of the wavelength of light. A simulation program helps to identify different patterns and to investigate the influence of changing parameters such as e.g. the angle of incidence or the polarization. A positive photoresist (Shipley S1805) is used to create two-dimensional metallic photonic crystals by UV interference lithography.

Identiferoai:union.ndltd.org:vtechworks.lib.vt.edu/oai:vtechworks.lib.vt.edu:10919/71551
Date12 1900
CreatorsMellert, Karolin
ContributorsApplied optics
PublisherRheinische Friedrich-Wilhelms-Universität Bonn
Source SetsVTechWorks NDLTD ETDs
LanguageGerman
Detected LanguageEnglish
TypeThesis
Formatapplication/pdf, application/pdf
RightsIn Copyright, http://rightsstatements.org/vocab/InC/1.0/

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