This investigation examines a novel means of integrating high-performance AlN piezoelectric thin films with a flexible stainless steel substrate (SUS 304) to fabricate a double-sided piezoelectric transducer. Various sputtering parameters, such as sputtering pressure, substrate temperature, nitrogen concentration, and RF power, were investigated to improve the piezoelectric characteristics of AlN thin films. Scanning electron microscopy and X-ray diffraction of AlN piezoelectric film reveal a rigid surface structure and highly c-axis-preferring orientation. The maximum output power per unit thickness was discussed, and the optimal sputtering parameters were determined.
The double-sided piezoelectric transducer is constructed by depositing AlN piezoelectric thin films on both the front and the back sides of SUS 304 substrate. The titanium (Ti) and platinum(Pt) layers were deposited using a dual-gun DC sputtering system between the AlN piezoelectric thin film and the SUS 304 substrate. The optimal deposition parameters for AlN thin films are sputtering pressure of 5 mTorr, substrate temperature of 300 ¢J, nitrogen concentration of 40 %, and RF power of 250 W. The maximum open circuit voltage of the transducer under the vibrational frequency of 80 Hz, vibration amplitude of 4mm, and mass loading of 0.5g, is approximately 20 V, or 5.3 V/£gm. After full-wave rectification and filtering through a 33 nF capacitor, a specific output power of 1.462 £gW/cm2 is obtained from the transducer with a load resistance of 7 M£[.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0809112-163308 |
| Date | 09 August 2012 |
| Creators | Zhong, I-Zhan |
| Contributors | Cheng-Tang Pan, Ying-Chung Chen, Wuu-Wen Lin, Chien-Jung Huang, Jung-Chuan Chou |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0809112-163308 |
| Rights | user_define, Copyright information available at source archive |
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