This study presents a high-performance ZnO piezoelectric transducer integrated with the flexible stainless steel substrate. The ZnO piezoelectric film of 1.08nm was deposited on the flexible stainless steel substrate using a RF magnetron sputtering system. The cantilever length of 1cm and the vibration area of 1cm2 were designed for low-frequency environment according to the Cantilever Vibration Theory. The effects of various sputtering parameters such as substrate temperature, RF power and sputtering pressure were investigated to improve the piezoelectric characteristics of ZnO thin films. It was also discussed the unit thickness of open voltage values, and then the optimal sputtering parameters were determined. The physical characteristics of ZnO thin films were obtained by the analyses of the scanning electron microscopy (SEM) and X-ray diffraction (XRD) to discuss the surfaces, cross section and crystallization of ZnO thin films. The voltage analysis were measured the open and load voltage by the measurement system. The optimal deposition parameters for ZnO thin films are substrate temperature of 300¢J, RF power of 75W, sputtering pressure of 9 mTorr and oxygen concentration of 60%, which were determined by physical characteristics and voltage analysis.
The study employs a precise mass loading of 0.57g on the cantilever to increase the vibration amplitude. The vibration source from 1~150Hz was provided to the piezoelectric transducer, and then the experimental results were showed resonance frequency of 75Hz by oscilloscope. When the optimal thickness of ZnO films is 1.08£gm and vibration amplitude is 1.19mm, the open circuit voltage of the power generator is 5.25V.After rectifying and flitting with a capacitor of 33nF,the maximum power of 1.0£gW/cm2 was achieved with the load resistance of 5M£[.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0813110-073847 |
| Date | 13 August 2010 |
| Creators | Huang, Yu-Chang |
| Contributors | Jyh-Cheng Yu, Lih-Shan Chen, Mau-Phon Houng, Ying-Chung Chen, Meng-Chyi Wu |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0813110-073847 |
| Rights | not_available, Copyright information available at source archive |
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