Supersaturated substitutional alloys formed by ion implantation and rapid liquid-phase epitaxial regrowth induced by pulsed-laser annealing have been studied using Rutherford-backscattering and ion-channeling analysis. A series of impurities (As, Sb, Bi, Ga, In, Fe, Sn, Cu) have been implanted into single-crystal (001) orientation silicon at doses ranging from 1 x 10^15/cm2 to 1 x 10^17/cm2. The samples were subsequently annealed with a Ω-switched ruby laser (energy density ~1.5 J/cm2, pulse duration 15 x 10-9 sec). Ion-channeling analysis shows that laser annealing incorporates the Group III (Ga, In) and Group V (As, Sb, Bi) impurities into substitutional lattice sites at concentrations far in excess of the equilibrium solid solubility. Channeling measurements indicate the silicon crystal is essentially defect free after laser annealing. The maximum Group III and Group V dopant concentrations that can be incorporated into substitutional lattice sites are determined for the present laser-annealing conditions. Dopant profiles have been measured before and after annealing using Rutherford backscattering. These experimental profiles are compared to theoretical model calculations which incorporate both dopant diffusion in liquid silicon and a distribution coefficient (k') from the liquid. It is seen that a distribution coefficient (k') far greater than the equilibrium value (k0) is required for the calculation to fit the experimental data. In the cases of Fe, Zn, and Cu, laser annealing causes the impurities to segregate toward the surface. After annealing, none of these impurities are observed to be substitutional in detectable concentrations. The systematics of these alloys systems are discussed.
| Identifer | oai:union.ndltd.org:unt.edu/info:ark/67531/metadc332015 |
| Date | 08 1900 |
| Creators | Wilson, Syd Robert |
| Contributors | Duggan, Jerome L., Redding, Rogers W., Sears, Raymond E., Deering, William D., McDaniel, Floyd Del. (Floyd Delbert), 1942- |
| Publisher | North Texas State University |
| Source Sets | University of North Texas |
| Language | English |
| Detected Language | English |
| Type | Thesis or Dissertation |
| Format | xi, 161 leaves : ill., Text |
| Rights | Public, Wilson, Syd Robert, Copyright, Copyright is held by the author, unless otherwise noted. All rights reserved. |
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