Metoda napěťového kontrastu při detekci sekundárních elektronů scintilačním detektorem ve VP SEM / Voltage contrast method at detection of secondary electrons by scintillation detector in VP SEM

Description

This thesis deals with scanning electron microscope working at higher pressure in the specimen chamber. The main goal was to study the voltage contrast on the PN junction of the transistor under suitable working conditions for using environmental scanning microscope. The observation of sample was enabled by a scintillation detector designed for observation of high pressure.

Links & Downloads

1. http://www.nusl.cz/ntk/nusl-219045

Tags

Additional Fields

Identifer	oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:219045
Date	January 2011
Creators	Jabůrek, Ladislav
Contributors	Špinka, Jiří, Jirák, Josef
Publisher	Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Source Sets	Czech ETDs
Language	Czech
Detected Language	English
Type	info:eu-repo/semantics/masterThesis
Rights	info:eu-repo/semantics/restrictedAccess